发明名称 Method for forming selective emitter of solar cell and diffusion apparatus for forming the same
摘要 A method for forming a selective emitter of a solar cell and a diffusion apparatus for forming the same are provided. The method includes texturing a surface of a silicon substrate by etching the silicon substrate, coating an impurity solution on the surface of the silicon substrate, injecting a first thermal energy into the whole surface of the silicon substrate, and, while the first thermal energy is injected into the whole surface of the silicon substrate, injecting a second thermal energy by irradiating a laser beam into a partial region of the surface of the silicon substrate.
申请公布号 US8053343(B2) 申请公布日期 2011.11.08
申请号 US20090505305 申请日期 2009.07.17
申请人 SNT. CO., LTD. 发明人 HUH YUSUNG;PARK SEUNGIL;LEE MANGEUN
分类号 H01L21/22;H01L21/38;H01L31/068 主分类号 H01L21/22
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