发明名称 TURBO-MOLECULAR PUMP
摘要 <P>PROBLEM TO BE SOLVED: To improve efficiency of heat transfer between constituent members in a blade exhaust portion. <P>SOLUTION: Stator blade component members 7 with spacers 5 and stator blades 6 integrally formed are axially layered in a multistage form. A clearance G is formed between the stepped portion 5f of the lower spacer 5 and the lower end surface 5a of the upper spacer 5, and an O-ring 21 formed of a soft material is interposed in the clearance G. Since the O-ring 21 is deformed following minute irregular portions formed on the surfaces of the groove 5f and lower end surface 5a of the spacer 5, the contact area of a contact portion is increased. Thereby, the efficiency of heat transfer is improved. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2011220148(A) 申请公布日期 2011.11.04
申请号 JP20100087878 申请日期 2010.04.06
申请人 SHIMADZU CORP 发明人 TSUBOKAWA TETSUYA
分类号 F04D19/04 主分类号 F04D19/04
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