| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a MEMS device with a fuse element having stable property. <P>SOLUTION: The MEMS device 100 includes: a substrate 10; interlayer insulating layers 30a, 30b, 30c formed above the substrate 10 and having a cavity 32; a functional element 20 contained in the cavity 32; and the fuse element 40 contained in the cavity 32 and electrically connected with the functional element 20. <P>COPYRIGHT: (C)2012,JPO&INPIT |
