PROCESS FOR PREPARING ZnAl TARGET MATERIAL AND ZnAl TARGET MATERIAL MADE THEREBY

摘要

The present invention provides a process for preparing a ZnAl alloy target material by providing a mixture of zinc powder and aluminum powder and obtaining a ZnAl alloy by sintering the mixture of zinc powder and aluminum powder by using a spark plasma sintering process. The present invention also describes a ZnAl alloy target material prepared by the above-described process.