| 摘要 |
There is a situation in that, although a speckle interference optical system is effective for clarification of a process of deformation of a specimen, resolution is insufficient, and execution of a phase shift method for improving the resolution involves a costly apparatus. A phase shift image for an initial fringe pattern is acquired, and a phase variation between phase information on an initial image and a next image is derived by a phase shift method. After that, a phase shift image for the next image is computed by calculation based on the acquired information.
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