发明名称 NANOTUBE BASED VAPOR CHAMBER FOR DIE LEVEL COOLING
摘要 The formation of electronic assemblies is described. In one embodiment, an electronic assembly includes a semiconductor die and a plurality of spaced apart nanotube structures on the semiconductor die. The electronic assembly also includes a fluid positioned between the spaced apart nanotube structures on the semiconductor die. The electronic assembly also includes a endcap covering the plurality of nanotube structures and the fluid, wherein the endcap is positioned to define a gap between the nanotube structures and an interior surface of the endcap. The endcap is also positioned to form a closed chamber including the working fluid, the nanotube structures, and the gap between the nanotube structures and the interior surface of the endcap.
申请公布号 US2011269271(A1) 申请公布日期 2011.11.03
申请号 US201113045503 申请日期 2011.03.10
申请人 发明人 VADAKKANMARUVEEDU UNNIKRISHNAN;CHRYSLER GREGORY MARTIN;MAVEETY JAMES G.
分类号 H01L21/50 主分类号 H01L21/50
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