| 摘要 |
<p>The valve (10) has a microchannel (30), and a membrane (40) arranged in a manner to seal off the microchannel. The membrane is equipped with resistive units e.g. electrical tracks (60). An upper face (41) of the membrane comprises a groove (50), and the resistive units are arranged in the groove. The resistive units are expanded sufficiently under the effect of heat produced by the flow of electric current to cause rupture of a part of the membrane when electric control current flows through the resistive units. The resistive units are made of a material chosen from gold, platinum, aluminum, manganese, zinc, nickel, inconel 600, chromium, copper and polysilicon. The membrane is made of a material chosen from trisilicon tetranitride, silicon nitride and silicon dioxide. Independent claims are also included for the following: (1) a microfluidic device comprising a fluid reservoir connected to a microchannel (2) a method for opening a microfluidic valve.</p> |
