发明名称 CAPACITIVE SENSOR
摘要 A capacitive sensor 1 includes a fixed electrode 6 and a movable electrode 5 that is movably supported by an anchor portion 3 through a beam portion 4. The fixed electrode 6 and the movable electrode 5 are opposed to each other with a gap interposed therebetween, thereby constituting a detecting unit. A capacitance suitable for a size of the gap is detected to detect a predetermined physical value. At least one of an end 4a of the beam portion 4 connected to the anchor portion 3 and an end 4b of the beam portion 4 connected to the movable electrode 5 is provided with a stress moderating unit 30 that moderates a stress.
申请公布号 EP2023152(A4) 申请公布日期 2011.11.02
申请号 EP20070742395 申请日期 2007.04.25
申请人 PANASONIC ELECTRIC WORKS CO., LTD. 发明人 FURUKUBO, EIICHI;WAKABAYASHI, DAISUKE;MIYAJIMA, HISAKAZU;OHBUCHI, MASAO;AOKI, RYO
分类号 G01P15/125;G01C19/56 主分类号 G01P15/125
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