| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an electron emission source with improved uniformity of a distribution of an electron emission volume. <P>SOLUTION: A first insulating layer 3a is formed on a cathode electrode 2. Then, an opening 5 is formed at the first insulating layer 3a. Afterwards, a member for forming a protruded part is formed on a top face of the first insulating layer 3a at a periphery of the opening 5. Next, the first insulating layer 3a and the member for forming the protruded part are made integrated by heat treatment. With this, a protruded part 7 is formed at the insulating layer 3a. Then, the opening is filled and a carbon nanotube layer 6 is formed so as to cover the protruded part 7. In this state, a part from a top face of the carbon nanotube layer 6 to a given depth of the first insulating layer 3a is removed by a wet type belt polishing machine. In this way, the protruded part 7 prevents the carbon nanotube layer 6 in the opening 5 from being damaged by scattering of shavings generated in a polishing step. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
