<p>The measuring sensor has an elementary sensor including a deformable mass (31) provided with a permanent magnet (32) whose direction of magnetization (M) is collinear with a direction of a gradient of a magnetic field component. The mass is deformed under the effect of force induced on the magnet by the gradient, and anchored on a fixed support device (33) by opposite anchoring points (36). The elementary sensor has a capacitive measuring unit that is constituted of electrodes (35.1, 35.2) for measuring an electrical parameter indicating mass deformation/constraints generated by the gradient. An independent claim is also included for a method for fabricating a magnetic field component gradient measuring sensor.</p>
申请公布号
EP2226643(B1)
申请公布日期
2011.11.02
申请号
EP20100155245
申请日期
2010.03.02
申请人
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES;INSTITUT POLYTECHNIQUE DE GRENOBLE