SYNCHRONIZING METHOD FOR STAGE AND SCANNER IN LASER PROCESSING APPARATUS

摘要

PURPOSE: A synchronizing method for a stage and a scanner in a laser processing device is provided to improve the speed and precision of laser processing by synchronizing a stage and a scanner. CONSTITUTION: A synchronizing method for a stage and a scanner in a laser processing device is as follows. A stage is operated for processing and a coordinate error on the stage is corrected(S10). A scanner is operated for processing and an error on the scanner is corrected(S20). The stage and the scanner are operated at the same time and coordinate errors on the stage and the scanner are corrected(S30). The correction of the coordinate errors is implemented by comparing the actually processed coordinates with coordinates on a drawing and compensating the difference.