REMOVAL APPARATUS OF RESIDUAL MATERIAL FROM THE SUBSTRATE FOR DISPLAY DEVICE

摘要

PURPOSE: A device for removing a byproduct of a substrate for a display device is provided to implement a substrate with a large area for a display device by installing a suction hole which suctions materials removed from the substrate. CONSTITUTION: A head unit(130) is installed in a body unit(110). A cleaning unit(140) is installed in the heat unit and removes byproduct on the loaded substrate by spraying the chemical and gas. A suction unit(150) suctions materials removed from a substrate(160) by the cleaning unit. The suction unit is installed in the head unit or body unit.