发明名称 Time-of-flight segmented Faraday
摘要 This measurement device is used to determine energy for charged particles. The measurement device includes two segments and a plate that define two thresholds or gaps. The current as a charged particle passes through these thresholds or gaps is measured. The measurement device then calculates the energy of the charged particles. Energy contamination also may be determined.
申请公布号 US8049168(B2) 申请公布日期 2011.11.01
申请号 US20090618115 申请日期 2009.11.13
申请人 VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. 发明人 SINCLAIR FRANK
分类号 H01J49/00 主分类号 H01J49/00
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