发明名称 |
Time-of-flight segmented Faraday |
摘要 |
This measurement device is used to determine energy for charged particles. The measurement device includes two segments and a plate that define two thresholds or gaps. The current as a charged particle passes through these thresholds or gaps is measured. The measurement device then calculates the energy of the charged particles. Energy contamination also may be determined.
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申请公布号 |
US8049168(B2) |
申请公布日期 |
2011.11.01 |
申请号 |
US20090618115 |
申请日期 |
2009.11.13 |
申请人 |
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. |
发明人 |
SINCLAIR FRANK |
分类号 |
H01J49/00 |
主分类号 |
H01J49/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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