发明名称 Dielectric structure in nonvolatile memory device and method for fabricating the same
摘要 A dielectric structure in a nonvolatile memory device and a method for fabricating the same are provided. The dielectric structure includes: a first oxide layer; a first high-k dielectric film formed on the first oxide layer, wherein the first high-k dielectric film includes one selected from materials with a dielectric constant of approximately 9 or higher and a compound of at least two of the materials; and a second oxide layer formed on the first high-k dielectric film.
申请公布号 US8049268(B2) 申请公布日期 2011.11.01
申请号 US20100748967 申请日期 2010.03.29
申请人 HYNIX SEMICONDUCTOR INC. 发明人 HONG KWON;LIM KWAN-YONG
分类号 H01L29/788 主分类号 H01L29/788
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