发明名称 |
METHOD FOR SUPPRESSING ADHERING SUBSTANCE ON SEED CRYSTAL SURFACE IN PRODUCING METAL FLUORIDE SINGLE CRYSTAL BY MELT-SOLIDIFICATION METHOD USING SEED CRYSTAL |
摘要 |
PROBLEM TO BE SOLVED: To provide a method for effectively suppressing adhesion of a black substance on the surface of a seed crystal in the production of a metal fluoride single crystal such as calcium fluoride by Czochralski method or Kyropoulos method.SOLUTION: In a period of at least from the start of melting a raw material metal fluoride until a seed crystal is brought into contact with the raw material melt, a portion (top end) of the seed crystal to be in contact with the raw material melt is kept in a standby mode in a high temperature region in a furnace so as to prevent condensation and adhesion of various kinds of volatile components on the top end of the seed crystal. Specifically, the top end is kept in a standby mode at a position c where the temperature is lower than the melting point of the raw material metal fluoride and equal to or higher than (melting point-400°C). When a scavenger is used, the seed crystal is started to be in a standby mode before the scavenger starts to melt and/or decompose. |
申请公布号 |
JP2011213574(A) |
申请公布日期 |
2011.10.27 |
申请号 |
JP20100277825 |
申请日期 |
2010.12.14 |
申请人 |
TOKUYAMA CORP |
发明人 |
YUTANI MASATO;SUGIMURA TSUNETOSHI;KUDO MASAMI |
分类号 |
C30B29/12;C30B15/00;C30B17/00 |
主分类号 |
C30B29/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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