发明名称 METHOD FOR SUPPRESSING ADHERING SUBSTANCE ON SEED CRYSTAL SURFACE IN PRODUCING METAL FLUORIDE SINGLE CRYSTAL BY MELT-SOLIDIFICATION METHOD USING SEED CRYSTAL
摘要 PROBLEM TO BE SOLVED: To provide a method for effectively suppressing adhesion of a black substance on the surface of a seed crystal in the production of a metal fluoride single crystal such as calcium fluoride by Czochralski method or Kyropoulos method.SOLUTION: In a period of at least from the start of melting a raw material metal fluoride until a seed crystal is brought into contact with the raw material melt, a portion (top end) of the seed crystal to be in contact with the raw material melt is kept in a standby mode in a high temperature region in a furnace so as to prevent condensation and adhesion of various kinds of volatile components on the top end of the seed crystal. Specifically, the top end is kept in a standby mode at a position c where the temperature is lower than the melting point of the raw material metal fluoride and equal to or higher than (melting point-400°C). When a scavenger is used, the seed crystal is started to be in a standby mode before the scavenger starts to melt and/or decompose.
申请公布号 JP2011213574(A) 申请公布日期 2011.10.27
申请号 JP20100277825 申请日期 2010.12.14
申请人 TOKUYAMA CORP 发明人 YUTANI MASATO;SUGIMURA TSUNETOSHI;KUDO MASAMI
分类号 C30B29/12;C30B15/00;C30B17/00 主分类号 C30B29/12
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