AREA-VARIABLE CAPACITOR STRUCTURE, COMB GRID CAPACITOR ACCELEROMETER AND COMB GRID CAPACITOR GYROSCOPE

摘要

An area-variable capacitor structure for a micro-mechanical sensor, and a micro-mechanical comb grid capacitive accelerometer and a micro-mechanical comb grid capacitive gyroscope, which employ the capacitor structure are disclosed. Each capacitor unit of the capacitor structure includes a movable electrode (1) and a fixed electrode (2), wherein the positive surface of the movable electrode (1) and the positive surface of the fixed electrode (2) are in parallel. The positive surface of the movable electrode (1) is rectangle and the positive surface of the fixed electrode (2) is triangle or sawtooth, or the positive surface of the movable electrode (1) is triangle or sawtooth and the positive surface of the fixed electrode (2) is rectangle. The triangular positive surface is only overlapped with a long side of the rectangular positive surface. Compared to the prior art, the micro-mechanical sensor which introduces the capacitor structure may carry out adjustment of the elastic coellicient.