Angular Velocity Detection Device

摘要

The present invention aims to provide an angular velocity detection device which is capable of reducing the effect of coupling between a drive electrode and a first displacement detection electrode by a floating capacity, and is low in cost. In the angular velocity detection device, an oscillating body 21 is displaceable in a first direction and a second direction which orthogonally intersect each other. The oscillating body 21 is oscillated in the first direction by an electrostatic force corresponding to a drive signal generated by a non-interference signal generator 1. A carrier signal generated by the non-interference signal generator 1 is applied to the oscillating body 21. A first displacement detection circuit 3 and a second displacement detection circuit 4 each detect a displacement of the oscillating body 21 as a displacement modulation signal indicative of a change in electrostatic capacity synchronized with the carrier signal to thereby detect an angular velocity. Here, the frequency of the drive signal and the frequency of the carrier signal are set so as to be generated at such a frequency ratio that a higher harmonic of the drive signal multiplied by an odd number does not the displacement modulation signal.