发明名称 |
Silicon carbide substrate, epitaxial wafer and manufacturing method of silicon carbide substrate |
摘要 |
<p>An SiC substrate (10) includes the steps of preparing a base substrate having a main surface and made of SiC, washing the main surface using a first alkaline solution, and washing the main surface using a second alkaline solution after the step of washing with the first alkaline solution. The SiC substrate has the main surface (11), and an average of residues on the main surface (11) are equal to or larger than 0.2 and smaller than 200 in number.
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申请公布号 |
EP2207196(A3) |
申请公布日期 |
2011.10.26 |
申请号 |
EP20090179540 |
申请日期 |
2009.12.17 |
申请人 |
SUMITOMO ELECTRIC INDUSTRIES, LTD. |
发明人 |
SASAKI, MAKOTO;HARADA, SHIN |
分类号 |
H01L21/04;H01L21/02 |
主分类号 |
H01L21/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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