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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要
본 발명은 기판과, 기판 상에 형성된 구리 또는 구리 합금으로 이루어지는 배선층과, 상기 배선층 상에 형성되고, 탄화수소 가스를 포함하는 처리 가스를 이용한 CVD에 의해 성막된 비결정 탄소막으로 이루어지는 구리 확산 배리어막과, 상기 구리 확산 배리어막 상에 형성된 저유전율 절연막을 구비한 것을 특징으로 하는 반도체 장치이다.
申请公布号
KR101076470(B1)
申请公布日期
2011.10.25
申请号
KR20097014781
申请日期
2007.12.26
申请人
发明人
分类号
H01L21/314;H01L21/768
主分类号
H01L21/314
代理机构
代理人
主权项
地址
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