| 摘要 |
PROBLEM TO BE SOLVED: To forcibly cool the inside of a space between a furnace body and a treatment container while keeping the space precisely at a slightly negative pressure.SOLUTION: A vertical heat treatment apparatus 1 includes: the furnace body 5 having a heating element 18; and the treatment container 3 arranged in the furnace body 5 and configured to house and heat-treat a plurality of objects W to be treated. An air supply line 52 and an air exhaust line 62 are connected to the furnace body 5. An air supply blower 53 and an air supply line valve mechanism 54A, and an air exhaust blower 63 and an air exhaust line valve mechanism 64A are provided in the air supply line 52 and the air exhaust line 62, respectively. A pressure detection system 50 detects the pressure in the space 33. A control section 51 controls, based on a detection signal from the pressure detection system 50, the air supply blower 53, the air supply line valve mechanism 54A, the air exhaust blower 63, and the air exhaust line valve mechanism 64A to keep the space 33 at the slightly negative pressure. |
