| 摘要 |
A method for determining the topography of a static surface (305) of an object (301) comprises the steps of: (a) selecting a region (301a) on the static surface (305) of the object (301); (b) directing an incident monochromatic electromagnetic wave (302) onto the region (301a) while the surface (305) and the incident monochromatic electromagnetic wave (302) are moved relative to one another, the incident monochromatic electromagnetic wave (302) being characterised by a frequency f0, an amplitude A0 and a propagation direction, the direction of movement (304) being substantially not parallel to the propagation direction of the incident monochromatic electromagnetic wave (302), wherein the surface (305) reflects the incident monochromatic electromagnetic wave (302) thus generating a reflected monochromatic electromagnetic wave (303), the movement (304) being characterized by a movement frequency (F) and a movement amplitude (A); (c) determining properties of the monochromatic electromagnetic wave (303) reflected from the region (301a) during the movement (304); and (d) analyzing properties, e.g. frequency f0, of the incident monochromatic electromagnetic wave (302) and the properties, e.g. frequency fr, of the reflected monochromatic electromagnetic wave (303) to obtain information about the topography of the region (301a) of the object (301). A corresponding system is also provided.
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