发明名称 Method of manufacturing a thin-film magnetic head
摘要 A manufacturing method for a thin-film magnetic head including first and second magnetic layers, a gap layer, a thin-film coil, and a coil insulating layer for insulating neighboring ones of turns of the thin-film coil. The manufacturing method includes the steps of: forming the first magnetic layer; forming the gap layer on the first magnetic layer; forming the second magnetic layer on the gap layer; forming the thin-film coil; and forming the coil insulating layer. The coil insulating layer is formed by stacking a plurality of insulating films formed by chemical vapor deposition.
申请公布号 US2011252631(A1) 申请公布日期 2011.10.20
申请号 US201113067462 申请日期 2011.06.02
申请人 TDK CORPORATION 发明人 SASAKI YOSHITAKA;INOUE TOHRU
分类号 G11B5/127;G11B5/31;G11B5/39 主分类号 G11B5/127
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