DYNAMIC QUANTITY SENSOR AND METHOD FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a dynamic quantity sensor and method for manufacturing the same, detecting the magnitude, direction of acceleration of an external force, and achieving low-cost manufacturing.SOLUTION: The dynamic quantity sensor is equipped with: a first substrate; a fixed portion disposed on the first substrate; a movable electrode one end of which is supported on the fixed portion and which is spaced from the first substrate; a fixed electrode disposed around the movable electrode and disposed in a detection direction of a dynamic quantity; a first terminal electrically connected to the fixed portion; and a second terminal electrically connected to the fixed electrode.