| 摘要 |
PROBLEM TO BE SOLVED: To provide a micromirror device wherein a micromirror substrate is assembled keeping its initial shape.SOLUTION: A micromirror device 100 includes: a micromirror substrate 110 having a membrane part 111; an electrode substrate 120 disposed oppositely to the micromirror substrate 110; an intermediate member 130 located between the micromirror substrate 110 and the electrode substrate 120 to regulate a space therebetween; and a solder ball 150 for bonding the micromirror substrate 110 and the electrode substrate 120 together. The intermediate member 130 includes a relief hole 131 to prevent contact with the membrane part 111. The intermediate member 130 also includes a groove 132 on a surface opposite the micromirror substrate 110 to surround the relief hole 131. The groove 132 is filled with surface firmly-adherent resin balls 140 which are very small powders. |
