发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 Provided is a semiconductor device using a p-type oxide semiconductor layer and a method of manufacturing the same. The device includes the p-type oxide layer formed of at least one oxide selected from the group consisting of a copper(Cu)-containing copper monoxide, a tin(Sn)-containing tin monoxide, a copper tin oxide containing a Cu—Sn alloy, and a nickel tin oxide containing a Ni—Sn alloy. Thus, transparent or opaque devices are easily developed using the p-type oxide layer. Since an oxide layer that is formed using a low-temperature process is applied to a semiconductor device, the manufacturing process of the semiconductor device is simplified and manufacturing costs may be reduced.
申请公布号 US2011253997(A1) 申请公布日期 2011.10.20
申请号 US201113087363 申请日期 2011.04.14
申请人 FACULTY OF SCIENCE AND TECHNOLOGY NEW UNIVERSITY OF LISBON;ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE 发明人 PARK SANG HEE;HWANG CHI SUN;BYUN CHUN WON;FORTUNATO ELVIRA M.C.;MARTINS RODRIGO F.P.;BARROS ANA R.X.;CORREIA NUNO F.O.;BARQUINHA PEDRO M.C.;FIGUEIREDO VITOR M.L.
分类号 H01L29/22;H01L21/36 主分类号 H01L29/22
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