LaB6 FILM AND CATHODE BODY, AND METHOD OF MANUFACTURING THEM

摘要

PROBLEM TO BE SOLVED: To solve the problem that an LaBfilm is easy to separate when the LaBfilm is formed on a substrate as a base by a magnetron sputtering device which can use a target uniformly over a long period and improve a film forming rate.SOLUTION: The surface of the substrate is nitrided, followed by the LaBfilm formed on the nitrided surface of the substrate by sputtering in the same processing device. Thus, the LaBfilm can be formed which is hard to separate from the substrate.