| 摘要 |
PROBLEM TO BE SOLVED: To provide an FIB (focused ion beam) processing device capable of suitably adjusting contrast and brightness of an image acquired to determine a mark for position recognition even though unevenness exists on a processing area.SOLUTION: The FIB processing device 100 includes an image acquisition section 3 for acquiring an image including the mark 2 for position recognition formed on a target sample 1 for processing, an adjustment section (contrast/brightness adjustment section 4) for adjusting at least either of the contrast and brightness of the image acquired with the image acquisition section 3, a mark position determination section 5 for determining a position of the mark 2 for position recognition on the basis of the adjusted image, and an irradiation section 7 for processing the target sample 1 by irradiating a focused ion beam 17 to the target sample 1 while correcting an irradiation position according to a position of the determined mark 2 for position recognition. The image acquisition section 3 acquires an image of a range wherein unevenness of the surface of the target sample 1 does not meet a prescribed criterion. |
