| 摘要 |
The present invention provides a test handler for a semiconductor device and an inspection method for a semiconductor device. The test handler for the semiconductor device according to the present invention comprises: a loading section, which is used to load a semiconductor device; a heating plate section, which receives the semiconductor device from the loading section and applies heat thereto; a testing section, which is used to carry out electrical performance test on the semiconductor device that is heated by the heating plate section; a reverse loading section, which reverses the semiconductor device to have a bottom of the semiconductor device facing upward before the semiconductor device is transferred from the heating plate section to the testing section; a reverse unloading section, which receives the semiconductor device from the testing section and reverses the semiconductor device to have the bottom thereof facing downward; an unloading plate section, which receives the semiconductor device from the reverse unloading section for loading therein; and an unloading section, which classifies the semiconductor device from the unloading plate section for loading therein according to the test result of the testing section. |
