| 摘要 |
A holding section (2) holds a probe card (1). Transport mechanisms (3a to 3d) have the function of transporting the probe card (1) from the holding section (2). A lock mechanism (4) is provided for the transport mechanism (3d). When the probe card cassette is placed in prober equipment, the lock mechanism (4) is released to allow the probe card (1) to be transported from the holding section (2) by the transport mechanisms (3a to 3d). When the probe card cassette is not placed in the prober equipment, the lock mechanism (4) operates to fix the probe card (1) in the holding section (2).
|
