发明名称 Semiconductor wafer, semiconductor device and method of fabricating the same
摘要 A semiconductor substrate according to an embodiment includes: a first semiconductor wafer having a first crystal; and a second semiconductor wafer formed of a second crystal substantially same as the first crystal on the first semiconductor wafer, a crystal-axis direction of unit cell thereof being twisted at a predetermined angle around a direction vertical to a principal surface of the second semiconductor wafer from that of the first semiconductor wafer.
申请公布号 US8039843(B2) 申请公布日期 2011.10.18
申请号 US20080192461 申请日期 2008.08.15
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 INABA SATOSHI
分类号 H01L29/04 主分类号 H01L29/04
代理机构 代理人
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