发明名称 Scanning susceptometer
摘要 According to one embodiment, an apparatus comprises a magnet assembly to produce a static magnetic field and a set of high-Tc flux transformers to detect a flux change from an item when the item is subjected to the static magnetic field produced by the magnet assembly and to produce a current based on the flux change. Additionally, the apparatus comprises a set of magnetoresistive sensors to detect a field produced by a current produced in the set of high-Tc flux transformers and a scanning mechanism to produce cyclic relative motion between the apparatus and the item. Furthermore, the apparatus comprises a magnetic shield to shield the magnetoresistive sensors, where the shield is an open ended cylinder made from mu-metal, where mu-metal is a very high magnetic permeability iron-nickel alloy. The apparatus additionally comprises a water interface mechanism to fill a gap between the apparatus and the item with water.
申请公布号 US8040128(B2) 申请公布日期 2011.10.18
申请号 US20090423189 申请日期 2009.04.14
申请人 FARRELL DAVID E;ALLEN CHRISTOPHER J;BRITTENHAM GARY M 发明人 FARRELL DAVID E.;ALLEN CHRISTOPHER J.;BRITTENHAM GARY M.
分类号 H01L43/06;G01N27/72 主分类号 H01L43/06
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