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发明名称
THE METHOD FOR PRODUCING OF MO-N/CU THIN LAYER BY USING INDUCTIVELY COUPLED PLASMA SPUTTERING DEVICE
摘要
申请公布号
KR20110113450(A)
申请公布日期
2011.10.17
申请号
KR20100032843
申请日期
2010.04.09
申请人
SNU R&DB FOUNDATION
发明人
KIM, JIN NAM;PARK, SO MI;HONG, WON HYUK;KIM, SHIN YOUNG;LEE, JUNG JOONG;CHUNG, SU JIN
分类号
C23C14/34;C23C14/02;C23C14/06;C23C14/14
主分类号
C23C14/34
代理机构
代理人
主权项
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