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发明名称
VERFAHREN UND VORRICHTUNG ZUR BEARBEITUNG VON WERKSTÜCKEN
摘要
申请公布号
AT528783(T)
申请公布日期
2011.10.15
申请号
AT20070725671T
申请日期
2007.05.30
申请人
PRO-BEAM AG & CO. KGAA
发明人
FRIEDBERGER, ALOIS;LOEWER, THORSTEN;FRICKE, SOEREN;SCHMID, ULRICH
分类号
H01J37/256;B01J19/08;G01N23/225;H01J37/304;H01J37/305;H01L21/66
主分类号
H01J37/256
代理机构
代理人
主权项
地址
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