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发明名称
TEM MIT ABERRATIONSKORREKTOR UND PHASENPLATTE
摘要
申请公布号
AT525741(T)
申请公布日期
2011.10.15
申请号
AT20090152629T
申请日期
2009.02.12
申请人
FEI COMPANY
发明人
TIEMEIJER, PETER;DE JONG, ALAN
分类号
H01J37/153;H01J37/26
主分类号
H01J37/153
代理机构
代理人
主权项
地址
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