APPARATUS FOR CURING THIN FILMS ON A MOVING SUBSTRATE
摘要
<p>An apparatus for curing thin films is disclosed. The apparatus includes a computer control system, a conveyance system, a flashlamp controller, and a flashlamp. The curing apparatus also includes a high average power, low-inductance cable connected between the flashlamp controller and the flashlamp. The low-inductance cable is smaller in diameter and is more flexible than the prior art and includes at least one liquid cooling line and multiple forward and return path wires interleaved in a regular hexagonal closed packed configuration such that every wire is adjacent to at least one cooling line and at least one wire of opposite polarity.</p>
申请公布号
WO2011127248(A1)
申请公布日期
2011.10.13
申请号
WO2011US31530
申请日期
2011.04.07
申请人
NCC NANO, LLC;JACKSON, DOUGLAS, K.;SCHRODER, KURT, A.;MCCOOL, STEVEN, C.
发明人
JACKSON, DOUGLAS, K.;SCHRODER, KURT, A.;MCCOOL, STEVEN, C.