发明名称 PROBE CARD AND TESTING DEVICE
摘要 PROBLEM TO BE SOLVED: To fully secure a clearance between an edge of an electrode pad and a mark of a probe pin, relating to a probe card and a testing device.SOLUTION: The probe card includes a probe card board, probe pins electrically connected to the probe card board, and a guide member having a clearance among the probe pins so that the individual probe pins can independently move and regulating the movement of the probe pins to make pin marks small.
申请公布号 JP2011203039(A) 申请公布日期 2011.10.13
申请号 JP20100069380 申请日期 2010.03.25
申请人 FUJITSU SEMICONDUCTOR LTD 发明人 SATO YASUNORI;ITO YASUYUKI;SUGIURA OSAMU
分类号 G01R1/073;H01L21/66 主分类号 G01R1/073
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