FILTER HOLDER, EXPOSURE DEVICE, AND DEVICE PRODUCTION METHOD

摘要

A filter holder is equipped with first and second frames that hold first and second filters, and first and second handles that are disposed on the first and second frames; and has first and second shape-modified parts that are formed on at least parts of the sides of the first and second frames, that face from one end surface to the other end surface of the first and second frames, and that are modified to the outside of the first and second frames. The positional relationship of the first handle to the first frame, and the positional relationship of the second handle to the second frame are different. Filter replacement can be precisely carried out.