发明名称 PRODUCTION SYSTEM AND MANUFACTURING METHOD OF ELECTRONIC DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a production system and a manufacturing method of an electronic device capable of performing quicker operations than a conventional device even if production information is changed.SOLUTION: A production support system 1 includes a history-information storage 3 storing history information related to the manufacturing of products, a master data storage 6 storing process flow information, and a past flow information generation part 4 generating past flow information on the basis of the history information during a period of time until production information stored in the history-information storage is changed. The production support system 1 further includes a predetermined flow information generation part 7 generating predetermined flow information on the basis of information related to a predetermined production process after the production information stored in the master data storage is changed; a process flow information generation part 8 generating the process flow information changed in the production information on the basis of the past flow information and the predetermined flow information, and an analyzer 10 analyzing the propriety of the prepared process flow information.
申请公布号 JP2011204805(A) 申请公布日期 2011.10.13
申请号 JP20100068992 申请日期 2010.03.24
申请人 TOSHIBA CORP 发明人 TANAKA TAKASHI;ITO TAKEMA
分类号 H01L21/02 主分类号 H01L21/02
代理机构 代理人
主权项
地址