发明名称 AMORPHOUS THIN FILM FOR SENSING
摘要 PROBLEM TO BE SOLVED: To provide a sensitive and selective sensor that can operate at room temperature or ambient temperature for low-power applications.SOLUTION: The present invention relates to low-power sensing, for sensing of chemical or biochemical analytes in a gas phase or a liquid phase. More in particular, the present invention relates to the use of a thin continuous film without grain boundaries as a sensing layer 40 in devices for sensing a predetermined analyte. In use, the sensing layer has a surface exposed to the analyte. The electrical impedance of the sensing layer changes upon adsorption of the predetermined analyte on the exposed surface of the sensing layer. The sensing layer preferably has a thickness in the range between about 1 nm and 100 nm, such as between about 1 nm and 30 nm. Preferably the sensing layer is an amorphous layer.
申请公布号 JP2011203256(A) 申请公布日期 2011.10.13
申请号 JP20110067179 申请日期 2011.03.25
申请人 STICHTING IMEC NEDERLAND 发明人 BLAUW MICHIEL;DAM THI VAN ANH;KOCHUPARACKAL JINESH
分类号 G01N27/02;G01N27/00;G01N27/22 主分类号 G01N27/02
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