| 摘要 |
PROBLEM TO BE SOLVED: To manufacture a piezoelectric film including an adhesion film and having an aligned orientation.SOLUTION: A Ti layer is deposited at an upper portion on a substrate, and a Pt layer is deposited on the Ti layer (a). The substrate on which the Ti layer and the Pt layer are deposited is carried in a plasma vapor deposition device (b). In the inside of the plasma vapor deposition device, the substrate is heated to a piezoelectric film deposition temperature in atmosphere including oxygen (c). In the inside of the plasma vapor deposition device, an oxide piezoelectric film is deposited onto the heated substrate by plasma vapor deposition (d). |
