发明名称 SUBSTRATE HAVING CHARACTER AND SYMBOL PART AND METHOD FOR PROCESSING CHARACTER AND SYMBOL PART
摘要 PROBLEM TO BE SOLVED: To provide a substrate having a character and symbol part, to which a production method for arranging characters and symbols with high work efficiency and free of problems about the quality can be applied.SOLUTION: The substrate is to be used for manufacturing a semiconductor and includes a character and symbol part comprising a character and/or a symbol arranged on one surface of a transparent substrate. The character and symbol part is a pattern composed of concave grooves formed by engraving the transparent substrate, the pattern disposed only in a prescribed region matching the shape of the character and/or the symbol, wherein the pattern composed of concave grooves is a slit type or grid type pattern and the transparent substrate is a glass substrate or a resin substrate.
申请公布号 JP2011203760(A) 申请公布日期 2011.10.13
申请号 JP20110153806 申请日期 2011.07.12
申请人 DAINIPPON PRINTING CO LTD 发明人 FUJIMOTO SHIGEICHI;KURIHARA MASAAKI
分类号 G03F1/38 主分类号 G03F1/38
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