SINGLE CRYSTAL SUBSTRATE WITH MULTILAYER FILM, PRODUCTION METHOD FOR SINGLE CRYSTAL SUBSTRATE WITH MULTILAYER FILM, AND DEVICE PRODUCTION METHOD

摘要

PROBLEM TO BE SOLVED: To correct warping that occurs in the formation of a multilayer film.SOLUTION: A single crystal substrate with a multilayer film includes a single crystal substrate 20 and a multilayer film 30 with compressive stress that has at least two layers formed upon one surface of the single crystal substrate 20, wherein the single crystal substrate 20 is equally divided into two regions 20U, 20D in the thickness direction thereof, and a heat denatured layer 22 is disposed within at least the region 20D on the surface side opposite to the surface side, on which the multilayer film 30 has been formed, of the single crystal substrate 20. Also disclosed are a production method therefor and a device production method using the production method.