VACUUM SPUTTERING CATHODE,申请号EP20030755581-传众专利搜索

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发明名称	VACUUM SPUTTERING CATHODE
摘要
申请公布号	EP1579471(B1)	申请公布日期	2011.10.12
申请号	EP20030755581	申请日期	2003.07.08
申请人	H.E.F.	发明人	AULAGNER, MICHEL;LABALME, LIONEL
分类号	H01J37/34;C23C14/34	主分类号	H01J37/34
代理机构		代理人
主权项
地址

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