METHOD AND CIRCUIT FOR OPERATION OF CAPACITANCE MICRO ELECTROMECHANICAL TRANSDUCER WITH ANALOG RECOVERY

摘要

FIELD: physics. ^ SUBSTANCE: proposed transducer incorporates at least one differential capacitor made up of two fixed electrodes and central moving electrode suspended there between to be displaced by external force to be measured. Method of operating capacitance transducer comprises applying equal opposite-direction excitation voltages between fixed electrodes and central electrode to measure central electrode displacement. Note here that charge part that may be tapped off central electrode and corresponds to electro static recovery force is called recovery noise. ^ EFFECT: notable in accuracy. ^ 14 cl, 12 dwg