METHOD OF MANUFACTURING PIEZOELECTRIC VIBRATING PIECE

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a piezoelectric vibrating piece wherein a step area is provided in the circumference of a main surface.SOLUTION: The method of manufacturing a mesa-type piezoelectric vibrating piece includes: a step for forming a metal film on a piezoelectric substrate (S101); a through-groove formation step for forming a through groove in the piezoelectric wafer to form a plan profile of the piezoelectric substrate (S106); a step for forming a photoresist film on the surface of the metal film (S202); a step for forming a resist pattern that defines a first mesa step along a portion of the plan profile (S203); a step for etching the metal film not protected by the resist pattern to form a metal film pattern (S204); a step for etching the piezoelectric substrate while using the metal film pattern as a protective film, so as to form a first mesa step (S301); a step for etching the metal film pattern from the side thereof (S302); and a step for etching the piezoelectric substrate while using the metal film pattern with etched side as a protective film to form a second mesa step (S304).