| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating apparatus which can apply a coating liquid uniformly keeping a flow rate of the coating liquid constant even when the coating liquid is sent to a reciprocatingly moving nozzle by a flexible coating liquid supply tube from a coating liquid storage part.SOLUTION: The coating apparatus includes a plurality of nozzles 23 discharging the coating liquid to a glass substrate, a main scanning direction moving mechanism reciprocating the nozzles 23 in a main scanning direction parallel to the surface of the glass substrate, the flexible coating liquid supply tube 64 for sending the coating liquid from the coating liquid storage part 24 to a plurality of nozzles 23, and a pressure fluctuation absorption mechanism 70 arranged between each nozzle 23 and the coating liquid supply tube 64, moving with the nozzle 23 in an integrated manner, and at the same time, sorbing the pressure fluctuation of the coating liquid passing therethrough. |
