| 发明名称 |
TITANIUM ETCHANT COMPOSITION AND METHOD OF FORMING A SEMICONDUCTOR DEVICE USING THE SAME |
| 摘要 |
A titanium etchant composition and a method of forming a semiconductor device using the same, the titanium etchant composition including a titanium remover; a corrosion inhibitor; and a deionized water; wherein the corrosion inhibitor includes 5-aminotetrazole.
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| 申请公布号 |
US2011240912(A1) |
申请公布日期 |
2011.10.06 |
| 申请号 |
US201113075430 |
申请日期 |
2011.03.30 |
| 申请人 |
KANG DONG-MIN;PARK HEON JIN;CHO KYOOCHUL;CHOI BAIKSOON;AHN SEUNGHYUN;KWON JEONG;JEON JUNGIG |
发明人 |
KANG DONG-MIN;PARK HEON JIN;CHO KYOOCHUL;CHOI BAIKSOON;AHN SEUNGHYUN;KWON JEONG;JEON JUNGIG |
| 分类号 |
C09K13/08;C09K13/00 |
主分类号 |
C09K13/08 |
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