| 发明名称 |
PRESSURE SENSOR AND METHOD FOR MANUFACTURING THE SAME |
| 摘要 |
PROBLEM TO BE SOLVED: To measure pressure in a region which is smaller than before.SOLUTION: A piezoelectric sensor 10 which has a transistor TR having a graphene layer 3 as a channel and a nanowire 8 of which one end is connected on a gate 5 of the transistor TR and which contains a piezoelectric material are employed. |
| 申请公布号 |
JP2011196740(A) |
申请公布日期 |
2011.10.06 |
| 申请号 |
JP20100061918 |
申请日期 |
2010.03.18 |
| 申请人 |
FUJITSU LTD |
发明人 |
YAGISHITA YOHEI |
| 分类号 |
G01L9/00;B82Y10/00;B82Y15/00;B82Y30/00;C01B21/06;C01B31/04;C01G9/02;H01L29/786;H01L41/08;H01L41/18;H01L41/22;H01L41/39;H01L51/05;H01L51/30 |
主分类号 |
G01L9/00 |
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