| 摘要 |
PROBLEM TO BE SOLVED: To reliably amend any defect in a laser beam machining method and a laser beam machining apparatus.SOLUTION: The laser beam machining method for amending any defect on a substrate by laser beam includes: a defect position information acquiring step (S1) of acquiring the defect positional information; application unit relative moving steps (S2, S8) of moving a laser beam application unit for applying the laser beam relatively to the substrate based on the position information so that the defect is located on its applicable area; and laser beam applying steps (S9, S10) of applying the laser beam by the laser beam application unit to the application area set in a non-pattern area of the substrate irrespective of the position of the defect. |
