发明名称 METHOD OF FORMING ELECTRODE AND ELECTRODE FORMING APPARATUS
摘要 PROBLEM TO BE SOLVED: To reduce irregularities in mutually crossing electrodes in a method and an apparatus for forming electrodes on a substrate.SOLUTION: After forming a number of finger electrodes on the substrate (step S102), wide bus electrodes crossing them are formed by coating. After the substrate is coated with a coating liquid including an electrode material and a photo-curing resin (step S103), UV light is applied to the coating liquid at a lapse of prescribed time to cure the coating liquid (step S104). A time difference ts from the coating to application of light is set based on a result obtained by measuring a change in the height of the coating liquid applied experimentally in advance (steps S101, S201-S204).
申请公布号 JP2011198893(A) 申请公布日期 2011.10.06
申请号 JP20100062160 申请日期 2010.03.18
申请人 DAINIPPON SCREEN MFG CO LTD 发明人 SANADA MASAKAZU
分类号 H01L31/04;H01L21/288 主分类号 H01L31/04
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